Browsing by Subject "chemical vapor deposition"
Now showing items 1-5 of 5
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Chemical Vapor Deposition and Characterization of Zirconia Films For High-k Dielectric Applications (2005-03-29)Department: Chemical EngineeringDue to the aggressive dimensional scaling of metal-oxide-semiconductor-field-effect-transistors (MOSFETs), direct tunneling current across the SiO2 gate dielectric layer has become a significant problem. High-k dielectric ...
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(2010-12-07)Department: Electrical EngineeringPassive devices are micro circuit elements that play a critical role in electronic products. The extraordinary physical properties of diamond such as high thermal conductivity, small thermal coefficient of expansion and ...
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(2010-02-11)Department: Chemical EngineeringCeramic materials in the Al-O-C and Hf-O-C systems were fabricated for electrical or thermal protection applications. AlOxCy films were produced via high-vacuum chemical vapor deposition (CVD) using dimethylaluminum ...
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(2018-06-22)Department: PhysicsNanomaterial research is developed from material science to broad nanotechnology, which leverages advances in material metrology and synthesis in support of microfabrication research. Particularly, carbon nanotubes (CNTs), ...
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(2012-04-13)Department: PhysicsThe first part of the dissertation focuses on randomly oriented freestanding films of multi-walled carbon nanotubes (MWCNTs), also known as buckypapers, which have been fabricated by a two-step process using electrophoretic ...