Electrothermal Behavior of Attached and Freestanding Diamond Resistors

Abstract

Passive devices are micro circuit elements that play a critical role in electronic products. The extraordinary physical properties of diamond such as high thermal conductivity, small thermal coefficient of expansion and hardness present intriguing possibilities for the fabrication of microstructures which benefit from an extended dynamic range, faster response, or reduced degradation. We have successfully fabricated miniature powered freestanding diamond resistors that demonstrated an ability to "glow" under power pulse loading and handle very high power density. These resistors are isolated from the substrate by a cavity. The freestanding diamond resistors were heated with voltage pulses such that the diamond resistors experienced thermal emission from Joule heating. They were examined for their electrothermal behavior including measurements of their infrared emission under power pulse loading and their dynamic thermal response. The freestanding resistors were found to withstand higher power than equivalent attached diamond resistors and could operate at power density levels well over 3x that of conventional passive power resistors.